What has started with a mechatronic system approach has now grown into complex system management with an increasing number of interactors and interrelated physics. Intelligent analysis is required for increased amounts of data, both during the design process and from the machine or module created. Due to higher precision the significance of the environment increases. This results in a growing importance of environmental conditions, such as temperature or pressure, or reducing their effects with vacuum. Cleanliness of this environment or of the part is essential, with new engineering principle like Design for Cleanliness applied. Machine induced disturbances such as vibrations or temperature play a more important role.