When you need to achieve quality control of surface features at the micro and nanoscale in production, interferometry offers advantages such as high speed, precision and no contact. If the features include steps and freeforms, interferometry can also give you the data you need.

Structured surfaces, designed for a particular function, or unintended features, as in surface damage or unwanted particulates, play a critical role in more and more precision products. Surface data is required just in time to support effective production. We have interferometer solutions that deliver the measurement data you need just when you need it.

These systems offer the measurement capability you need plus the capability to integrate directly into your production environment.

At a glance

  • In-line automated measurement in <1sec.
  • Feature extraction.
  • User selectable sampling, trend graphs and tolerance setting.
  • Quality reporting.
  • TCP-IP communication for Industry 4.0 integration.
  • Optional X,Y,Z positioning stages.
  • Dancer option for roll-to-roll application.

Structured surfaces
Structured surfaces
Electronics 1-1
Electronics
Microfluidics-3
Microfluidics
Particle inspection
Particle inspection
System name
AR2 AR5 AR10 AR20 AR50
Z range (μm) 96 14 2,4 1,6 0,9
FOV per capture (mm) 2,8 x 2,8. 1,1 x 1,1 0,55 x 0,55 0,28 x 0,28 0,11 x 0,11
Z resolution (μm) 0,002 0,002 0,002 0,002 0,002
Time to result (sec) 1,5 (0,9 measurement +0,6 calculation) 1,5 1,5 1,5 1,5
Working distance (mm) 34 34 33,5 20 13
Optional dancer Yes Yes Yes No No
Opional x,y,z stages Yes Yes Yes Yes Yes
AR2 AR5 AR10 AR20 AR50
application example

ARINAA_PET_IMI

Printed electronics line -an AR5 system has been integrated into a line producing printed electronics for automotive applications. Laser scribes from 100nm to 1 micron depth are assessed against tolerance values for control of the laser process.

LR_IBS_Arinna_Close_2

How does the ARINNA interferometer work?

How do you achieve surface feature control at the nanoscale in volume production with the ease and efficiency you need?

ARINNA is a high speed interferometer that combines the advantages of nanoscale surface measurement with ruggedness and a small footprint that allows it to measure in-line, just where you need it. While interferometers bring the advantage of speed, accuracy and non-destructive measurement, stepped structures and noisy environments have ususally been their limitation. Not so with ARINNA.

The wavelength scanning technique employed by ARINNA avoids the need for mechanical scanning in the measurement head, as employed by some interferometric systems. This overcomes associated limitations to both the measurement speed and system integration (such as the ability for 360 degrees orientation of the head). For in-line use, a patented vibration compensation technique has been integrated into the design of ARINNA. This technique avoids the need for large and/or complex isolation systems; at times a limiting factor in the application of high precision optical measurement systems in the field.

ARINNA is able to measure discrete step heights and surface quality with a vertical resolution <2nm. A mega pixel camera captures a surface scan in under 1 sec. It can be used for in-line defect detection and characterisation, optical surface and structure measurement, 3D surface topology measurement, MEMS/NEMS inspection and more.

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