High temperature air bearings
Spatial Atomic Layer Deposition
In Spatial Atomic Layer Deposition (SALD) equipment, the manufacturer required a design featuring a rigid structure and a consistent process gap between the moving substrate and the injector head. Supporting the injector head directly on the moving substrate table using air bearings would provide an accurate, scalable and cost-effective solution. Components should withstand maximum temperatures of 250°C, maintain a particle-free production environment and prevent grease contamination. IBS recommended custom-made full carbon air bearings capable of enduring temperatures up to 250°C. These non-contact air bearings, without housing, create a stable and frictionless air gap between the injector frame and the moving substrate table. IBS collaborated on the design to ensure proper air supply and mounting of the full carbon air bearings. The use of these bearings resulted in a stable, lubricant-free and particle-free process gap at high temperatures, with infinite performance lifespan and zero maintenance requirement.