Micro mirror array calibration
A light conditioning unit consisting of thousands of mems mirrors required a test module. Each micro-mirror of the programmable array must be individually assessed for positioning accuracy. Compensation per mirror for offset and inclination errors could then be applied. Through a highly innovative optical scanning approach, the customer was enabled to measure multiple arrays integrated in-situ with the associated electronics, going well beyond their initial expectation of single array qualification before assembly. Through mirror calibration, system response times were drastically reduced, and optical proximity effects reduced by 50%.