Unmatched precision in distance, position and motion measurement, even in the dirtiest of environments.
Inductive sensors provide high resolution measurement for even the dirtiest environments. These advantages have made inductive sensors indispensable for many machine builders, production managers, or precision metrology applications.
Also know as Eddy current sensors, these sensors provide advantages including non-contact measurement, nanometer resolution and high-speed for the most challenging applications. As precision engineers, we can provide expert help and unique solutions matched to your application. Whether you need to measure distance, thickness, in vacuum or wireless, to name a few requirements, we have solutions and expertise to match your needs.
Driver name |
ECL202 | ECL150 | ECL101/ECL110 | ECW110 | ECA101 | ECA110 | EDA400 |
|---|---|---|---|---|---|---|---|
| Max. bandwidth | 15 kHz | 15 kHz | 80 kHz | 1kHz | 10kHz | 10kHz | 1,5KHz |
| Measurement range | 0.25mm - 15 mm | 0.50mm - 15 mm | 0.50mm - 15 mm | 2mm - 3,5 mm | 0.50mm - 15 mm | 0.50mm - 15 mm | 0,20mm-0,9mm |
| Typical linearity | 0,2% | 0,2% | 0,5% F.S. | 0,5% F.S. | Non-linear | Non-linear | 0,3% F.S |
| Resolution at 15kHz | Non-ferrous 0,007%, Ferrous 0,009% | Non-ferrous 0,007%, Ferrous 0,009% | Non-ferrous 0,009%, Ferrous 0,011% | 100nm @1kHz | Non-ferrous 0,02%, Ferrous 0,02% | Non-ferrous 0,02%, Ferrous 0,02% @10kHz | 10nm@1,5KHz |
| Zero/Offset adjust | Yes | Yes | Yes | No | Yes | No | |
| Typical thermal drift | 0,01% F.S.*/C | 0,01% F.S.*/C | 0,04% F.S.*/C | 0,04% F.S.*/C | 0,04% F.S.*/C | 0,04% F.S.*/C | 0,01% F.S.*/C |
| LED range indicator | Yes | Yes | Yes | No | Yes | No | |
| Other features | Bandwidth: 100 Hz, 1 kHz, 10 kHz, 15 kHz (user selectable) | Bandwidth: 250 Hz, 1 kHz, 10 kHz, 15 kHz (user selectable) | Two environmental ranges - Standard to 125C, High to 200C | Two environmental ranges - Standard to 125C, High to 200C | Embeddable unit, no user adjustment | Differential system. Qualified for Space application. | |
| *F.S. = full scale | |||||||
| ECL202 | ECL150 | ECL101/ECL110 | ECW110 | ECA101 | ECA110 | EDA400 | |
The ECL202 eddy-current sensor system delivers exceptional resolutions, down to 10nm, and bandwidths up to 15kHz. The electronics of the ECL202 are based on the latest FPGA digital technology, delivering excellent noise immunity and very high stability. The system provides a linear analogue voltage output (0 - 10 Volt) proportional to changes in the target position and a digital (switched) output with a user programmed switching threshold.
| Probe model | Range Type | Range mm | Near gap mm | Material Type |
Resolution nm @100Hz |
@1 kHz | @10 kHz | @15 kHz | ECL202e @15kHz | Thermal drift probe %F.S./C | Thermal drift driver | |
| U3 | Fine | 0,25 | 0,05 | Non-ferrous | 10 | 15 | 25 | 30 | - | 0,04 | 0,04 | |
| 0,25 | 0,05 | Ferrous | 15 | 25 | 40 | 50 | - | 0,06 | 0,10 | |||
| Standard | 0,50 | 0,25 | Non-ferrous | 25 | 30 | 60 | 65 | 400 | 0,04 | 0,04 | ||
| 0,50 | 0,25 | Ferrous | 30 | 40 | 100 | 110 | 400 | 0,08 | 0,08 | |||
| U5 | Fine | 0,625 | 0,25 | Non-ferrous | 30 | 35 | 70 | 75 | - | 0,04 | 0,04 | |
| 0,625 | 0,25 | Ferrous | 40 | 50 | 75 | 80 | - | 0,8 | 0,04 | |||
| Standard | 1,25 | 0,25 | Non-ferrous | 45 | 65 | 140 | 150 | 400 | 0,04 | 0,1 | ||
| 1,25 | 0,025 | Ferrous | 80 | 120 | 240 | 260 | 400 | 0,1 | 0,1 | |||
| U8 | Fine | 1,00 | 0,35 | Non-ferrous | 20 | 30 | 50 | 60 | - | 0,02 | 0,04 | |
| 1,00 | 0,35 | Ferrous | 50 | 60 | 100 | 110 | - | 0,04 | 0,04 | |||
| Standard | 2,00 | 0,35 | Non-ferrous | 40 | 60 | 135 | 145 | 400 | 0,02 | 0,04 | ||
| 2,00 | 0,35 | Ferrous | 70 | 80 | 180 | 200 | 400 | 0,04 | 0,04 | |||
| U12 | Fine | 1,60 | 0,60 | Non-ferrous | 40 | 50 | 100 | 110 | - | 0,01 | 0,01 | |
| 1,60 | 0,60 | Ferrous | 50 | 70 | 120 | 130 | - | 0,02 | 0,02 | |||
| Standard | 3,50 | 0,60 | Non-ferrous | 60 | 90 | 210 | 240 | 400 | 0,02 | 0,01 | ||
| 3,50 | 0,60 | Ferrous | 100 | 170 | 250 | 300 | 400 | 0,03 | 0,01 | |||
| U18 | Standard | 5,00 | 0,75 | Non-ferrous | 80 | 130 | 300 | 340 | 400 | 0,01 | 0,01 | |
| 5,00 | 0,75 | Ferrous | 130 | 200 | 390 | 450 | 500 | 0,01 | 0,01 | |||
| U25 | Standard | 8,00 | 1,25 | Non-ferrous | 180 | 250 | 500 | 600 | 600 | 0,01 | 0,01 | |
| 8,00 | 1,25 | Ferrous | 180 | 250 | 500 | 600 | 600 | 0,01 | 0,01 | |||
| U38 | Standard | 12,50 | 1,50 | Non-ferrous | 200 | 350 | 700 | 800 | 800 | 0,01 | 0,01 | |
| 12,50 | 1,50 | Ferrous | 200 | 350 | 700 | 800 | 800 | 0,02 | 0,01 | |||
| U50 | Standard | 15,00 | 2,00 | Non-ferrous | 300 | 400 | 800 | 900 | 900 | 0,01 | 0,01 | |
| 15,00 | 2,00 | Ferrous | 300 | 450 | 900 | 1000 | 1000 | 0,01 | 0,01 |
Reactor plate oxide thickness - the customer required to measure the surface oxide layer thickness of nuclear fuel rods. This thickness is used to confirm the remaining lifetime of the rod, optimising the economic performance of the fuel. As it also see flaws in the oxide layer, it is used for root cause analysis of failed fuel rods and to confirm fuel behaviour models.
The ECL150 system provides up to 8 channels of high resolution position and displacement measurement in a small package. It is ideal for multi-sensing applications in industrial environments such as synchronized x,y,z positioning; 5 degrees of freedom shaft measurement or multi-point thickness measurement.
| Probe model | Range mm | Near gap mm | Material Type |
Resolution nm @250Hz |
@1 kHz | @10 kHz | @15 kHz | ECL150e @15kHz | Thermal drift probe %F.S./C | Thermal drift driver | |
| U3 | 0,50 | 0,05 | Non-ferrous | 35 | 45 | 60 | 65 | 400 | 0,04 | 0,04 | |
| 0,50 | 0,05 | Ferrous | 60 | 80 | 100 | 110 | 400 | 0,08 | 0,08 | ||
| U5 | 1,25 | 0,25 | Non-ferrous | 75 | 100 | 140 | 150 | 400 | 0,04 | 0,10 | |
| 1,25 | 0,25 | Ferrous | 130 | 180 | 240 | 260 | 400 | 0,10 | 0,10 | ||
| U8 | 2,00 | 0,35 | Non-ferrous | 75 | 100 | 135 | 145 | 400 | 0,02 | 0,04 | |
| 2,00 | 0,35 | Ferrous | 100 | 125 | 180 | 200 | 400 | 0,04 | 0,04 | ||
| U12 | 3,50 | 0,60 | Non-ferrous | 120 | 160 | 210 | 240 | 400 | 0,02 | 0,01 | |
| 3,50 | 0,60 | Ferrous | 150 | 200 | 250 | 300 | 400 | 0,03 | 0,01 | ||
| U18 | 5,00 | 0,75 | Non-ferrous | 170 | 240 | 300 | 340 | 400 | 0,01 | 0,01 | |
| 5,00 | 0,75 | Ferrous | 230 | 300 | 390 | 450 | 500 | 0,01 | 0,01 | ||
| U25 | 8,00 | 1,25 | Non-ferrous | 330 | 430 | 600 | 650 | 650 | 0,01 | 0,01 | |
| 8,00 | 1,25 | Ferrous | 360 | 480 | 650 | 750 | 750 | 0,01 | 0,01 | ||
| U38 | 12,50 | 1,50 | Non-ferrous | 600 | 750 | 1000 | 1200 | 1200 | 0,01 | 0,01 | |
| 12,50 | 1,50 | Ferrous | 650 | 800 | 1100 | 1300 | 1300 | 0,02 | 0,01 | ||
| U50 | 15,00 | 2,00 | Non-ferrous | 750 | 1000 | 1300 | 1400 | 1400 | 0,01 | 0,01 | |
| 15,00 | 2,00 | Ferrous | 800 | 1100 | 1400 | 1500 | 1500 | 0,01 | 0,01 |
Machine tool metrology frame - 24 sensors were integrated into a machine tool bed to enable real time measurement of thermal and work piece related deformations. Wireless probes were employed to ease integration and provide a cost effective smart metrology solution.
Where precision measurement is required for high speed applications, the ECL101 delivers exceptional bandwidths up to 80kHz. Typical examples of high speed applications include measurement of motion or thermal growth of high speed spindles; observation of high speed vibrations or ultrasonic applications. The system can be calibrated in the field. For multi-channel applications, the ECL101 is available as a system of stacked circuit boards for maximum density in OEM applications. Up to eight channels can be ordered as a single ECL110 system.
| Probe model | Range mm | Near gap mm | Material Type | Resolution nm @1 kHz | @10 kHz | @80 kHz | |
| U3 | 0,50 | 0,05 | Non-ferrous | 30 | 60 | 200 | |
| 0,50 | 0,05 | Ferrous | 40 | 80 | 300 | ||
| U5 | 1,25 | 0,25 | Non-ferrous | 60 | 100 | 250 | |
| 1,25 | 0,25 | Ferrous | 90 | 150 | 400 | ||
| U8 | 2,00 | 0,35 | Non-ferrous | 100 | 160 | 400 | |
| 2,00 | 0,35 | Ferrous | 130 | 210 | 500 | ||
| U12 | 3,50 | 0,60 | Non-ferrous | 200 | 280 | 700 | |
| 3,50 | 0,60 | Ferrous | 260 | 350 | 1200 | ||
| U18 | 5,00 | 0,75 | Non-ferrous | 240 | 480 | 3200 | |
| 5,00 | 0,75 | Ferrous | 320 | 640 | 4500 | ||
| U25 | 8,00 | 1,25 | Non-ferrous | 350 | 700 | 5300 | |
| 8,00 | 1,25 | Ferrous | 350 | 700 | 5300 | ||
| U38 | 12,50 | 1,50 | Non-ferrous | 550 | 1100 | 8300 | |
| 12,50 | 1,50 | Ferrous | 550 | 1100 | 8300 | ||
| U50 | 15,00 | 2,00 | Non-ferrous | 660 | 1300 | 10000 | |
| 15,00 | 2,00 | Ferrous | 660 | 1300 | 10000 |
Stealth ships - Ultra precision probes were implemented under water to detect vibration and/or motion of moving surfaces on sea-going vessels (propellers, rudders...). The combination of high bandwidth and extreme precision offered by the ECL101 was perfect for the challenge.
The ECW110 provides wireless precision measuring technology with up to 42hrs continuous measurement. For applications where cabling is an issue such as robotics; measurement systems attached to a moving stage or moveable pallet; or where space is of a premium and multiple sensors are essential. The system communicates with a laptop using a dedicated Wi-Fi network at speeds up to 1KHz. The system consists of a driver and 1 to 3 probes.
| Probe model | Range mm | Material Type |
Resolution nm @1 kHz |
|
| U8 | 0,35 - 2,35 | Non-ferrous | 100 | |
| 0,35 - 2,35 | Ferrous | 125 | ||
| U12 | 0,60 - 4,10 | Non-ferrous | 160 | |
| 0,60 - 4,10 | Ferrous | 200 |
Magnetic Levitation Stage - A contactless, wireless solution was developed for in vacuo real time control of the short stroke of a magnetically levitated precision stage. A set of synchronised probes were used to measure the z height and two rotations out of plane. 2kHz bandwidths were achieved with deterministic data transmission at latency figures of 300us; sufficient for real time positioning control. Packet loss rates of 1.1e-7 were also realised to ensure reliability.
For demanding applications where a highly cost effective solution is required, the ECA101 system can deliver the precision you need. This non-linear system offers easy opeation with adjustable gain, offset and set-point switch output.
| Probe model | Range mm | Near gap mm | |
| U3 | 0,50 | 0,05 | |
| U5 | 1,25 | 0,25 | |
| U8 | 2,00 | 0,35 | |
| U12 | 3,50 | 0,60 | |
| U18 | 5,00 | 0,75 | |
| U25 | 8,00 | 1,25 | |
| U38 | 12,50 | 1,50 | |
| U50 | 15,00 | 2,00 |
Thread detection - While conventional sensors have trouble detecting the presence of threads, the ECA101 can easily detect the difference between a tapped and untapped hole. With an unthreaded hole, the signal is altered, with comparison to a threaded hole. As a distance sensor, thread pitch can be detected.
The ECA110 is a versatile system ideal for applications requiring high resolution and high repeatability without the higher price of linear sensors. These embeddable PCB units are shipped from the factory fully calibrated with no user adjustments – ready to install. Suitable for embedded OEM applications, this system is vaialable in units of 100 or more.
| Probe model | Range mm | Offset mm | |
| U3 | 0,50 | 0,05 | |
| U5 | 1,25 | 0,25 | |
| U8 | 2,00 | 0,35 | |
| U12 | 3,50 | 0,60 | |
| U18 | 5,00 | 0,75 | |
| U25 | 8,00 | 1,25 | |
| U38 | 12,50 | 1,50 | |
| U50 | 15,00 | 2,00 |
Featuring state-of-the-art Eddy Current Sensors, the new EDA400 controller is the ideal off the shelf solution for Fast Steering Mirror and other differential sensing applications. The EDA400 system comes with two matched pairs of high resolution non-contact Eddy Current Sensors and is fully qualified for Space applications.
| Probe model | Range mm | Material type | Resolution nm@1,5kHz |
| U5 | 1+/- 0,2 to +/- 0,9 | Ferrous | 10 |
Eddy-current sensors use magnetic fields that completely surround the end of the probe. This creates a comparatively large sensing field resulting in a spot size approximately three times the probe’s sensing coil diameter.
For eddy-current sensors, the ratio of the sensing range to the sensing coil diameter is 1:3. This means that for every unit of range, the coil diameter must be three times larger. Thus a 5mm eddy-current sensor requires a 15mm target diameter. If your target must be smaller than the sensor’s spot size, special calibration may be able to compensate for the inherent measurement errors.
In some applications, the gap between the sensor and target can become contaminated by dust, liquids such as coolant, and other materials which are not part of the intended measurement. Unlike capacitive sensors, eddy-current sensors are not affected by non-conductive contaminants such as dust, water, and oil. Eddy-current probes are rated at IP67 and can even be used completely immersed in non-corrosive liquid.
