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CPL490 - Picometer displacement measuring system

Extremely accurate CPL490 active probe with picometer resolution

The CPL490 is our most precise, highest performing non-contact position and displacement measuring system for very high precision and/or very high speed measurements. With resolutions up to 10 times higher compared to our other systems, IBS Precision Engineering is proud to present you the most precise capacitive displacement system in the world.

At 1 kHz bandwidth, resolution is as low as 50 picometers. At 50kHz bandwidth, a remarkably high frequency for capacitive measuring systems, the precision is still less than 0,3 nanometers. 

 

Key specifications

  • Resolution down to 50 picometer  (RMS)
  • 1, 10, 15, 50 kHz bandwidth (user selectable - 100 kHz available on request)
  • Range from 10 – 200 µm
  • Linearity 0,2%
  • Temperature range 15-40 degrees C.
  • Small phase shift (excellent for servo applications)
  • Differential output to National Instruments 68-pin connector
  • Remote selection of sensitivity and bandwidth with LabVIEW drivers

 

Output features

  • Adjustable zero
  • Analog output (±10 V BNC)
  • Differential output (±10 V National Instruments 68-pin connector)
  • Up to 3 channels per systems

 

Probe choices

A range of advanced probes is available for the CPL490, each containing active electronics. The resolution depends on the selected probe, range and bandwidth. The flat target surface diameter must be 1,3 times larger than the sensing area diameter to maintain specifications. Please contact us for expert advice

Probe model

Sensing area

Min. target size (mm)

Range** (um)

Linearity (% F.S.*)

Resolution (nm) @ 1kHz

 

@ 10 kHz

 

@ 15 kHz

 

@ 50 kHz

2G-C8-0.5 0,5 mm 0,65 20-30 0,4 0,05 0,07 0,09 0,26
      25-75 0,2 0,17 0,27 0,35 1,0
      50-150 0,3 0,38 0,8 1,0 3,3
2G-C8-1.2 1,2 mm 1,56 25-75 0,2 0,15 0,20 0,22 0,63
      50-150 0,2 0,33 0,40 0,52 1,7
      100-300 0,2 0,68 1,0 1,3 3,8

* F.S. = full scale / ** Range: near gap - far gap

 

Probe lay-out

 

Application example

CPL490 application example

 

Click here to see other capacitive measuring systems.