For this research we have measured against a piezo-actuated stage in a vacuum cryostat that had been brought to a temperature of 3 Kelvin (-270°C). It is, of course, important that the sensor materials can withstand this extremely low temperature, but also that the resolution, bandwidth and sensitivity can be replicated at these extreme temperatures.
To qualify performance, calibrated artefacts have been developed to allow sensitivity shifts to be measured at the lowest temperatures. Direct and real-time sensitivity adjustment was then applied.
Capacitive sensors can be used to measure objects at a temperature of 3K.
Sensitivity at 3K changes by less than 12% compared to the sensitivity at ambient temperature.
Sensitivity can be adjusted to compensate for the sensitivity change at this low temperature.
In cryogenic environments, we can now measure the displacement of precision stages, for example, for adjusting optics and mirrors. Furthermore, we can also measure the alignment or vibrations of components, such as in the alignment of coupled optical fibers and samples in an electron microscope.
Cryogenic environments are studied or used in many industries. Examples are nuclear physics, materials research, optics or quantum device development. Our research has shown that it is possible to use our capacitive sensors for measurements in cryogenic environments, which makes our sensors suitable for even more different types of applications.
Applications where cryogenic environments are used, where displacement measurements can be possible or are already being used:
Are you in need of measuring displacement in cryogenic environments? We are open to discussing the new possibilities with our capacitive sensors for your specific application. Feel free to contact us directly.