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Contact probe IBS Precision Engineering has developed an new ultra-precision touch probe system, the Triskelion probe. This probe system is suitable for point measurements as well as scanning. Its excellent measuring uncertainty and full 3D measurement capabilities make this probe suitable for ultra-precision 3D metrology. Possible applications include 3D ultra-precision (micro-/nano-) CMMs as well as on-machine metrology on machine tools. |
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| Probe concept. A schematic representation of the probe concept is shown in figure 1.1. The stylus is elastically suspended by means of flexures. The stylus is a attached to these flexures via a rigid body; this body contains target discs which serve as measurement targets for the capacitance sensors. During deflection of the probe tip, the capacitance sensors measure the displacements of these target discs; the displacement of the probe tip can thus be determined. |
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The figure left shows the working principle of the probe system for deflection of the probe tip in vertical and sideways direction. Note that this is a 2D simplification, the actual design features three flexures and three capacitance sensors, allowing deflection in full 3D, while the deflection of the tip is also measured in x-, y- and z-direction. |
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